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Cabot Microelectronics Corporation Announces Adoption of Novus(tm) A7100 Aluminum CMP Slurry for Advanced Node High-K Metal Gate Logic Process

Aurora, IL, Aug. 28, 2013 (GLOBE NEWSWIRE) -- Cabot Microelectronics Corporation (Nasdaq:  CCMP), the world's leading supplier of chemical mechanical planarization (CMP) polishing slurries and a growing CMP pad supplier to the semiconductor industry, today announced that its Novus A7100 Aluminum CMP slurry products have been adopted by several leading edge customers to help enable 28/20 nanometer High-K Metal Gate integration schemes used for advanced logic devices.

The Novus A7100 Aluminum slurry product platform is the result of Cabot Microelectronics' industry-leading CMP technology and extensive research and development in close collaboration with strategic customers.  Novus A7100 contains a combination of unique engineered abrasive particles and proprietary chemistry to remove aluminum and the complex stack of work-function metals within the transistor gates of advanced semiconductor logic devices.  This CMP solution was designed to polish aluminum and then stop on the underlying dielectric material and therefore minimize dielectric material erosion and aluminum recess.  Novus A7100 is formulated to optimize removal rate, limit erosion and recess, and meet low defect requirements.

Charles Chen, Cabot Microelectronics' Global Business Director, stated, "The Novus A7100 Aluminum CMP slurry provides our customers with a solution for a critical process step in enabling High-K Metal Gate device integration at advanced technology nodes.  We believe the extremely low recess levels that can be achieved across a wide range of feature sizes and densities, results in better device reliability and transistor performance."


Cabot Microelectronics Corporation, headquartered in Aurora, Illinois, is the world's leading supplier of CMP polishing slurries and a growing CMP pad supplier to the semiconductor industry.  The company's products play a critical role in the production of advanced semiconductor devices, enabling the manufacture of smaller, faster and more complex devices by its customers.  The company's mission is to create value by developing reliable and innovative solutions, through close customer collaboration, that solve today's challenges and help enable tomorrow's technology.  Since becoming an independent public company in 2000, the company has grown to approximately 1,050 employees on a global basis.  For more information about Cabot Microelectronics Corporation, visit or contact Trisha Tuntland, Manager of Investor Relations at 630-499-2600.


This news release may include statements that constitute "forward looking statements" within the meaning of federal securities regulations.

These forward-looking statements include statements related to:

future sales and operating results; company and industry growth, contraction or trends; growth or contraction of the markets in which the company participates; international events, regulatory or legislative activity, or various economic factors; product performance; the generation, protection and acquisition of intellectual property, and litigation related to such intellectual property; new product introductions; development of new products, technologies and markets; natural disasters; the acquisition of or investment in other entities; uses and investment of the company's cash balance; financing facilities and related debt, payment of principal and interest, and compliance with covenants and other terms; the company's capital structure; and the construction and operation of facilities by Cabot Microelectronics Corporation.

These forward-looking statements involve a number of risks, uncertainties, and other factors, including those described from time to time in Cabot Microelectronics' filings with the Securities and Exchange Commission (SEC), that could cause actual results to differ materially from those described by these forward-looking statements.

In particular, see "Risk Factors" in the company's quarterly report on Form 10-Q for the quarter ended June 30, 2013 and in the company's annual report on Form 10-K for the fiscal year ended September 30, 2012, both filed with the SEC.

Cabot Microelectronics assumes no obligation to update this forward-looking information.

CONTACT: Trisha Tuntland
         Manager, Investor Relations

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